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"en": "The collection and preprocessing of this dataset has been reported in detail in Juola J., Hovi A., Rautiainen M., 2022. A spectral analysis of stem bark for boreal and temperate tree species. Ecology and Evolution. DOI:10.1002/ece3.8718\r\n\r\nThe dataset includes stem bark reflectance spectra of ten boreal and temperate tree species. We measured hemispherical-directional reflectance factors (HDRF) of stem bark samples. The data were measured using a Specim IQ imaging spectrometer attached to a tree mounting setup. The imaging spectrometer operates in the visible and near-infrared wavelength region (400–1000 nm). The measurements were made in the Greater Helsinki area in Finland, and in Järvselja in Estonia. We measured 20 trees per species, accounting to a total of 200 unique stem bark samples. One sample refers to a hyperspectral reflectance image taken of a single tree stem. The 200 mean spectral signatures (presented in this dataset) were calculated for each sample by averaging the HDRF values over all pixels per wavelength. The measurements were conducted from May to August 2020. All measurements were made under natural illumination conditions and the images were taken in perpendicular view-angle to the tree stem. The dataset includes two tabular files that contain: 1) the mean reflectance spectrum for each of the ten common boreal and temperate tree species (calculated from the 20 samples per species), and 2) all 200 reflectance spectra (20 per tree species). The sampled species were: Scots pine (Pinus sylvestris L.), Norway spruce (Picea abies (L.) Karst), silver birch (Betula pendula Roth), grey alder (Alnus incana (L.) Moench), black alder (Alnus glutinosa (L.) Gaertn.), English oak (Quercus robur L.), European aspen (Populus tremula L.), European ash (Fraxinus excelsior L.), Norway maple (Acer platanoides L.), and littleleaf linden (Tilia cordata Mill.).\r\n\r\nThe two spreadsheets are organized as follows: first three rows that start with hashtag (#) contain comments for citing, first column \"tree_species\" (Pinus_sylvestris, Picea_abies, Betula_pendula...) indicates the tree species, and the subsequent columns \"wl397.32\"-\"wl1003.58\" indicate the measured HDRF value at that wavelength. The encoding of the csv file is UTF-8. \r\n\r\nThe data in file \"mean_tree_species_stem_bark_reflectance_spectra_Juola_et_al_2021.csv\" is the same as what can be found in Version 1. We only changed the first row's naming to make it clearer.\r\n\r\nIf you use this dataset, please cite Juola et al. [1,2]:\r\n[1] Juola J., Hovi A., Rautiainen M., 2022. A spectral analysis of stem bark for boreal and temperate tree species. Ecology and Evolution. DOI:10.1002/ece3.8718\r\n[2] Juola J., Hovi A., Rautiainen M., 2022. A dataset of stem bark reflectance spectra for boreal and temperate tree species. Mendeley Data, V2, doi: 10.17632/pwfxgzz5fj.2"
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"en": "Thickness profile data measured for aluminium oxide thin film grown by atomic layer deposition (ALD) using trimethylaluminium and water as reactants at 300 degrees Celsius on an all-silicon lateral high-aspect-ratio (LHAR) test structure of type PillarHall(TM) LHAR3 (layout v1b), nominal gap height 500 nm. Part of this data has been used in the publication \"Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels\" https://doi.org/10.1039/D0CP03358H, where this sample was number 8 (unique manufacturing code V0001, see Table S3 of the supplementary info, which also contains details of the layouts: http://www.rsc.org/suppdata/d0/cp/d0cp03358h/d0cp03358h1.pdf) \r\n\r\nThickness profiles have been measured optically after removal of the top membrane by adhesive tape, by spectroscopic reflectometry in the visible wavelength range. In the optical thickness measurements, the refractive index is assumed constant (refractive index vs. wavelength this has been determined earlier for similar films also grown at 300 degrees Celsius) and thickness is allowed to vary. The optical model consists of smooth single-crystal silicon and ALD aluminium oxide films. Any silicon oxide below the ALD film is counted in the aluminium oxide thickness. Also roughness will impact the measurement result. For each measurement point, the location, the fitted thickness, and the goodness of fit is presented. For the 50x magnification, measurement spot diameter size is estimated as about 5-6 micrometers. The raw data have the centre of measurement as zero point of horizontal axis. The data needs to be shifted horizontally to have the zero point at the beginning of the LHAR cavity. Sometimes, the removal of the membrane has not worked in the beginning of the cavity (where the support pillars in the PillarHall LHAR3 design are more densely located) and the measurement has been made on a place that includes membrane remnants. In such cases, the fit of the optical model to the results has been poor and the data points should be rejected."
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